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(C) 2021 The Optical Society
The Optical Society
Silicon photonic microelectromechanical phase shifters for scalable programmable photonics
2021-11-10
Pierre Edinger
Alain Yuji Takabayashi
Carlos Errando-Herranz
Umar Khan
Hamed Sattari
Peter Verheyen
Wim Bogaerts
Niels Quack
Kristinn B. Gylfason
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