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Authors: K. Van Acoleyen, J. Roels, T. Claes, D. Van Thourhout, R. Baets
Title: NEMS-based optical phase modulator fabricated on Silicon-On-Insulator
Format: International Conference Presentation
Publication date: 9/2011
Journal/Conference/Book: 8th International Conference on Group IV Photonics
Volume(Issue): FC6 p.371-373
Location: London, United Kingdom
DOI: 10.1109/group4.2011.6053820
Citations: 9 ( - last update: 14/7/2024)
4 (OpenCitations - last update: 3/5/2024)
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We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9µm long slot waveguide an optical phase change of 60° was observed.

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