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Authors: S. Dwivedi, A. Ruocco, M. Vanslembrouck, T. Spuesens, P. Bienstman, P. Dumon, T. Van Vaerenbergh, W. Bogaerts
Title: Experimental Extraction of Effective Refractive Index and Thermo-Optic Coefficients of Silicon-On-Insulator Waveguides using Interferometers
Format: International Journal
Publication date: 10/2015
Journal/Conference/Book: Journal of Lightwave Technology
Editor/Publisher: IEEE/OSA, 
Volume(Issue): 33(21) p.4471 - 4477
DOI: 10.1109/JLT.2015.2476603
Citations: 38 ( - last update: 21/7/2024)
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We propose and demonstrate an accurate method
of measuring the effective refractive index and thermo-optic coefficient of Silicon-On-Insulator waveguides in the entire C-band using three Mach-Zehnder Interferometers. The method
allows for accurate extraction of the wavelength dispersion and takes into account fabrication variability. Wafer scale measurements are performed and effective refractive index variations are presented for three different waveguide widths: 450, 600 and 800 nm, for the TE polarization. The presented method is generic and can be applied to other waveguide geometries and material systems and for different wavelengths and polarizations.

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