We propose and demonstrate an accurate method
of measuring the effective refractive index and thermo-optic coefficient of Silicon-On-Insulator waveguides in the entire C-band using three Mach-Zehnder Interferometers. The method
allows for accurate extraction of the wavelength dispersion and takes into account fabrication variability. Wafer scale measurements are performed and effective refractive index variations are presented for three different waveguide widths: 450, 600 and 800 nm, for the TE polarization. The presented method is generic and can be applied to other waveguide geometries and material systems and for different wavelengths and polarizations.
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