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Authors: C. Lin, Juan Santo Domingo Penaranda, Jolien Dendooven, Christophe Detavernier, Christophe Detavernier, R. Baets, N. Le Thomas
Title: Photonic integrated alumina waveguide gratings for far-field structured illumination at UV wavelengths
Format: International Conference Proceedings
Publication date: 6/2021
Journal/Conference/Book: Conference on Lasers and Electro-Optics (CLEO)
DOI: 10.1364/CLEO_SI.2021.STu1A.6
Citations: 1 ( - last update: 14/7/2024)
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We demonstrate far-field UV structured illumination implemented with integrated aluminum oxide (AlOx) waveguide gratings. Based on simulation and experimental results, we discuss the performances of two AlOx waveguide gratings operating at l
= 360nm.

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