| Authors: | S. Selvaraja, M.Schaekers, W. Bogaerts, D. Van Thourhout, R. Baets | | Title: | Polycrystalline silicon as waveguide material for advanced photonic | | Format: | International Conference Proceedings | | Publication date: | 5/2007 | | Journal/Conference/Book: | 11th IEEE/LEOS Benelux Annual Workshop 2007
| | Location: | Eindhoven, Netherlands | | Citations: | Look up on Google Scholar
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Abstract
We report single mode polycrystalline-silicon on insulator photonic wire fabricated in a CMOS fabrication facility. The optical quality and the material aspects of the polycrystalline-silicon for photonic application were studies. We report an optical propagation loss of 13.4dB/cm which is the lowest loss reported for a 500nm wide photonic wire. Related Research Topics
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