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Authors: A. Masood, M. Pantouvaki, D. Goossens, G. Lepage, P. Verheyen, D. Van Thourhout, P. Absil, W. Bogaerts
Title: CMOS compatible heater fabrication approaches for thermal tuning of photonics devices
Format: International Conference Proceedings
Publication date: 11/2012
Journal/Conference/Book: Proceedings of the 2012 Annual Symposium of the IEEE Photonics Society Belenux Chapter
Volume(Issue): p.307-310
Location: Mons, Belgium
Citations: Look up on Google Scholar
Download: Download this Publication (556KB) (556KB)


Thennal tuning is widely used method /01' precise wavelength selectivity in various integrated photonic devices. Since silicon photonics is gaining wider acceptance for communication and sensing devices, CMOS compatibility • in fabrication method as
well as post fabrication integration - Is gaining prominence. That makes it relevant to explore heater fabrication approaches for silicon photonics, which are highly compatible with CMOS and €ifficienf in junctionality. We present an overview of such
different approaches currently being developed by us.

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