| Authors: | Y. Shimura, A. Srinivasan, D. Van Thourhout, R. Van Deun, M. Pantouvaki, J. Van Campenhout, R. Loo | | Title: | Enhancement of Active Phosphorus Concentration in Ge CVD layers in View of Group-IV Optical Interconnections using Low Temperature in-situ Doping and High Order Ge Precursors | | Format: | International Conference Presentation | | Publication date: | 11/2015 | | Journal/Conference/Book: | International Symposium on EcoTopia Science 2015
| | Citations: | Look up on Google Scholar
|
Related Research Topics
|
|
