| Author: | Sukumar Rudra
| | Promotor: | Dries Van Thourhout
| | Dutch Title: | Diractieve micro-elektromechanische structuren in silicium en silicium-germanium | | English Title: | Diractive Micro-Electromechanical Structures in Si and SiGe | | Date: | 21/8/2013 | | Main Language: | English | | ISBN number: | ISBN 978-90-8578-614-6 | | Thesis: |
 (29.7MB) | | Presentation: | (6.1MB) |
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