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Authors: J. Stiens, W. Ranson, R. Cottam, C. De Tandt, R. Vounckx, V. Kotov, G. Shkerdin, B. Dhoedt, R. Baets
Title: Experimental characterization of reactive ion etched germanium diffraction gratings at 10.6 ┬Ám
Format: International Journal
Publication date: 12/1996
Journal/Conference/Book: Appl. Phys. Lett.
Editor/Publisher: 3-6951/96/69(23), 
Volume(Issue): 69(23) p.3453-3455
Internal Reference: [O-531]
DOI: 10.1063/1.117249
Citations: 1 ( - last update: 22/1/2023)
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