| Authors: | S. Scheerlinck, D. Van Thourhout, R. Baets | | Title: | UV-based Nano Imprint Fabrication of Gold Grating Couplers on Silicon-on-Insulator | | Format: | International Conference Proceedings | | Publication date: | 7/2007 | | Journal/Conference/Book: | 2007 Digest of the IEEE/LEOS Summer Topicals Meetings
| | Volume(Issue): | p.MB3.4 | | Location: | Oregon, United States | | DOI: | 10.1109/leosst.2007.4288342 | | Citations: | 1 (Dimensions.ai - last update: 17/11/2024)
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Abstract
Fiber-to-waveguide gold grating couplers are fabricated using UV-based Nano
Imprint Lithography and lift-off on top of an unprocessed Silicon-on-Insulator chip. Over 22%
efficiency and a 1dB bandwidth of 36nm is demonstrated in the telecom band. Related Research Topics
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