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Authors: U. Plachetka, A. Kristensen, S. Scheerlinck, N. Whitbread, J. Huskens, N. Koo, H. Kurz
Title: Fabrication of Photonic Components by Nanoimprint Technology within ePIXnet
Format: International Journal
Publication date: 1/2008
Journal/Conference/Book: Microelectronic Engineering
Editor/Publisher: Elsevier, 
Volume(Issue): 85(5-6) p.886-889
DOI: 10.1016/j.mee.2008.01.013
Citations: 9 (Dimensions.ai - last update: 28/2/2021)
6 (OpenCitations - last update: 1/3/2021)
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Abstract

The joined research activities on nanoimprint lithography (JRA-NIL) within a European Network of Excellence (ePIXnet) are described. The achievements are presented in three different exemplary applications.

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