Authors:	K. Watanabe, J. Schrauwen, A. Leinse, D. Van Thourhout, R. Heideman, R. Baets
Title:	Total reflection mirrors fabricated on silica waveguides with focused ion beam
Format:	International Journal
Publication date:	8/2009
Journal/Conference/Book:	Electronics Letters
Volume(Issue):	45(17) p.883-884
DOI:	10.1049/el.2009.0473
Citations:	5 (Dimensions.ai - last update: 17/11/2024) 3 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract

Efficient total reflection mirrors are fabricated on silica-based waveguides by direct milling with a focused ion beam. To reduce the excess losses of the mirrors, a two-step milling technique is employed that reduces the roughness of the mirror surface while maintaining a high milling rate. A focused ion beam is used to fabricate low-loss mirrors with small excess losses of about 1.0 dB.