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Authors: S. Rudra, J. Roels, G. Bryce, L. Haspeslagh , A. Witvrouw , D. Van Thourhout
Title: SiGe based Grating Light Valves: A leap towards monolithic integration of MOEMS
Format: International Journal
Publication date: 2/2010
Journal/Conference/Book: Microelectronic Engineering
Volume(Issue): 87 p.1195-1197
Internal Reference: [N-967]
DOI:
Download: Download this Publication (500KB) (500KB)

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