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Authors: S. Selvaraja, W. Bogaerts, D. Van Thourhout, M. Schaekers
Title: Thermal trimming and tuning of hydrogenated amorphous silicon nano-photonic devices
Format: International Journal
Publication date: 8/2010
Journal/Conference/Book: Applied Physics Letters
Volume(Issue): 97 (7)
DOI: 10.1063/1.3479918
Citations: 13 ( - last update: 14/7/2024)
10 (OpenCitations - last update: 3/5/2024)
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Deposited silicon and in particular hydrogenated amorphous silicon forms an attractive alternative platform for realizing compact photonic integrated circuits. In this paper we report on trimming (towards lower wavelengths) and tuning (towards higher wavelengths) of photonic devices through a suitable thermal treatment. The former is achieved by a material density change, the latter through the thermo-optic effect. By using fourier transform infrared spectroscopy, a change in the hydrogen content is identified as the source of the density change. A total wavelenght tuning range of +/- 13 nm is achievable, which can be used for compensating fabrication imperfections.

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