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Authors: A. Witvrouw, R. Van Hoof, G. Bryce, B. Du Bois, A. Verbist, S. Severi, L. Haspeslagh, H. Osman, J. De Coster, L. Wen, R. Puers, R. Beernaert, H. De Smet, S. Rudra, D. Van Thourhout
Title: SiGe MEMS technology: a Platform Technology Enabling Different Demonstrators
Format: International Conference Proceedings
Publication date: 10/2010
Journal/Conference/Book: 218th ECS Meeting, Las Vegas, NV (invited)
Volume(Issue): 33(6) p.799-812
Location: Las Vegas, United States
DOI: 10.1149/1.3487610
Citations: 10 (Dimensions.ai - last update: 17/10/2021)
7 (OpenCitations - last update: 3/5/2021)
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