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Authors: K. Van Acoleyen, J. Roels, T. Claes, D. Van Thourhout, R. Baets
Title: NEMS-based optical phase modulator fabricated on Silicon-On-Insulator
Format: International Conference Presentation
Publication date: 9/2011
Journal/Conference/Book: 8th International Conference on Group IV Photonics
Volume(Issue): FC6 p.371-373
Location: London, United Kingdom
Internal Reference: [N-1156]
Download: Download this Publication (994KB) (994KB)


We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9µm long slot waveguide an optical phase change of 60° was observed.

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