Authors:	K. Van Acoleyen, J. Roels, T. Claes, D. Van Thourhout, R. Baets
Title:	NEMS-based optical phase modulator fabricated on Silicon-On-Insulator
Format:	International Conference Presentation
Publication date:	9/2011
Journal/Conference/Book:	8th International Conference on Group IV Photonics
Volume(Issue):	FC6 p.371-373
Location:	London, United Kingdom
DOI:	10.1109/group4.2011.6053820
Citations:	9 (Dimensions.ai - last update: 14/4/2024) 4 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract

We present a compact low-power optical phase modulator on Silicon-On-Insulator consisting of an under-etched slot waveguide. By applying a voltage of 15V across a 9µm long slot waveguide an optical phase change of 60° was observed.

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