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Authors: K. Van Acoleyen, J. Roels, P. Mechet, T. Claes, D. Van Thourhout, R. Baets
Title: Ultra-compact phase modulator based on a cascade of NEMS-operated slot waveguides fabricated in Silicon-On-Insulator
Format: International Journal
Publication date: 5/2012
Journal/Conference/Book: IEEE Photonics Journal
Volume(Issue): 4(3) p.779-788
Internal Reference: [N-1277]
Download: Download this Publication (1.2MB) (1.2MB)

Abstract

Phase modulation is one of the key functionalities in an integrated photonics circuit. In the silicon photonics platform several approaches have been undertaken. The thermo-optic effect is slow and relatively power hungry while a carrier-based approach is fast (>Gbps) but lossy and weak. Integration of other (e.g. electro-optic) materials typically struggles with fabrication issues which limit the effect. Here, we present a nano-electromechanical systems based approach. By applying a voltage over a free-standing slot waveguide, the slot width will change resulting in an effective index change and thus a phase change. Using a cascaded structure, the effect can be enlarged without reducing the speed. A phase change of 40° was observed for a voltage of 13 V over a cascade of three 5.8 µm long free-standing slots. The expected speed is in the MHz range.


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