Authors:	A. Subramanian, S. Selvaraja, A. Dhakal, K. Komorowska, R. Baets
Title:	Grating couplers for Si3N4 waveguides at 900 nm
Format:	International Conference Proceedings
Publication date:	4/2012
Journal/Conference/Book:	16th European Conference on Integrated Optics (ECIO 2012)
Volume(Issue):	p.paper 182
Location:	Barcelona, Spain
Citations:	Look up on Google Scholar
Download:	(328KB)

Abstract

We demonstrate a 1-D grating coupler for silicon nitride wires with an average efficiency of 7 dB in the 890-910 nm wavelength range. The effect of etch depth on the grating efficiency is presented and compared with the theoretical results