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Authors: A. Masood, M. Pantouvaki, D. Goossens, G. Lepage, P. Verheyen, D. Van Thourhout, P. Absil, W. Bogaerts
Title: CMOS-compatible Tungsten Heaters for Silicon Photonic Waveguides
Format: International Conference Proceedings
Publication date: 8/2012
Journal/Conference/Book: 9th International Conference on Group IV Photonics
Volume(Issue): p.234-236
Location: San Diego, United States
DOI: 10.1109/group4.2012.6324144
Citations: 20 ( - last update: 14/7/2024)
5 (OpenCitations - last update: 10/5/2024)
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We present a Tungsten thermo-optic tuner on SOI, using standard CMOS back-end fabrication processes. Tuning efficiency of 35.2mW/FSR was achieved on ring resonators with 10%-90% heating time of 2.8ìs.

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