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Authors: A. Masood, M. Pantouvaki, D. Goossens, G. Lepage, P. Verheyen, J. Van Campenhout, P. Absil, D. Van Thourhout, W. Bogaerts
Title: Fabrication and characterization of CMOS-compatible integrated tungsten heaters for thermo-optic tuning in silicon photonics devices
Format: International Journal
Publication date: 7/2014
Journal/Conference/Book: Optical Materials Express
Volume(Issue): 4(7) p.1383-1388
DOI: 10.1364/OME.4.001383
Citations: 24 ( - last update: 21/7/2024)
20 (OpenCitations - last update: 27/6/2024)
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We present fabrication and characterization of tungsten (W) heaters for thermo-optic tuning on silicon-on-insulator (SOI). The wafer-scale fabrication of these thermal tuners was done using standard complementary metal-oxide-semiconductor (CMOS) back-end fabrication materials and processes. Static and transient characterizations of heaters are presented.

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