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Authors: W. Xie, D. Van Thourhout
Title: Fabrication of high-Q silicon nitride microdisk resonator coupled with on-chip waveguide
Format: International Conference Proceedings
Publication date: 11/2014
Journal/Conference/Book: Proceedings of the 19th Annual Symposium of the IEEE Photonics Society Benelux Chapter
Editor/Publisher: Sonia M. García-Blanco, Klaus J. Boller, Mustafa Akin Sefunc, and Douwe H. Geuzebroek, 
Volume(Issue): p.145-148
Location: Twente, Netherlands
Citations: Look up on Google Scholar
Download: Download this Publication (1.6MB) (1.6MB)


We designed and fabricated free-standing SiN microdisk resonators vertically coupled with on-chip SiN waveguides. During the full process the temperature is kept below 270¢X. We experimentally demonstrated an intrinsic quality factor of 1.4„e105 and a large free spectral range of ~10nm in a microdisk operating near 1310nm. We also showed that the coupling strength between the disk resonator and the bus waveguide can be readily changed by tuning the parameters of the geometric configuration. In the same way, we realized selective coupling to the different radial modes of the disk. These devices are promising for the SiN photonic community.

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