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Authors: J.F.I.B Hoste, B.G. De Geest, P. Bienstman
Title: Determination of thickness and density of a wet multilayer polymer system with sub-nanometer resolution by means of a dual polarization silicon-on-insulator microring
Format: International Conference Proceedings
Publication date: 2/2015
Journal/Conference/Book: SPIE Photonics West
Volume(Issue): p.paper 9337-13
Location: San Francisco, CA, United States
DOI: 10.1117/12.2079074
Citations: Look up on Google Scholar
Download: Download this Publication (1.5MB) (1.5MB)

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