|Authors: ||Y. Zhu, Yuqing Jiao, Jie Wang, W. Xie, B. Tian, D. Van Thourhout|
|Title: ||Ultra-compact silicon nitride grating coupler for microscopy system|
|Format: ||International Conference Presentation|
|Publication date: ||11/2015|
|Journal/Conference/Book: ||Proceedings of the 20th Annual Symposium of the IEEE Photonics Benelux Chapter
|Location: ||Brussels, Belgium|
|Citations: ||Look up on Google Scholar
Grating couplers have been widely used for coupling light between photonic chips and optical fiber. For some quantum-optics and bio-optics experiments on the other hand, there is a need to achieve good light coupling between photonic chips and a microscope system. Here we propose an ultra-compact silicon nitride grating optimized for coupling to a microscope system. The grating coupler is about 4x2 um2 in size. 3D-FDTD simulations show that up to 80% of the light @ 532 nm can be coupled upwards.. We fabricated the grating coupler by electron beam lithography and preliminary experimental results show the relationship between coupling efficiency and grating period.