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Authors: Y. Zhu, Yuqing Jiao, Jie Wang, W. Xie, B. Tian, D. Van Thourhout
Title: Ultra-compact silicon nitride grating coupler for microscopy system
Format: International Conference Presentation
Publication date: 11/2015
Journal/Conference/Book: Proceedings of the 20th Annual Symposium of the IEEE Photonics Benelux Chapter
Location: Brussels, Belgium
Citations: Look up on Google Scholar
Download: Download this Publication (297KB) (297KB)


Grating couplers have been widely used for coupling light between photonic chips and optical fiber. For some quantum-optics and bio-optics experiments on the other hand, there is a need to achieve good light coupling between photonic chips and a microscope system. Here we propose an ultra-compact silicon nitride grating optimized for coupling to a microscope system. The grating coupler is about 4x2 um2 in size. 3D-FDTD simulations show that up to 80% of the light @ 532 nm can be coupled upwards.. We fabricated the grating coupler by electron beam lithography and preliminary experimental results show the relationship between coupling efficiency and grating period.

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