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Authors: A. Hermans, M. Van Daele, C. Kieninger, J. Dendooven, S. Clemmen, C. Detavernier, C. Koos, R. Baets
Title: CMOS-Compatible ALD Zinc Oxide Coating for On-Chip Second-Order Nonlinear Optical Functionalities
Format: International Conference Proceedings
Publication date: 5/2017
Journal/Conference/Book: Conference on Lasers and Electro-Optics 2017
Volume(Issue): p.SM3K.3
Location: San Jose, United States
Internal Reference: [N-2062]
DOI:
Download: Download this Publication (373KB) (373KB)

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