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Authors: M. Hsu, A. Marinelli, C. Merckling, M. Pantouvaki, J. Van Campenhout, P. Absil, D. Van Thourhout
Title: Orientation-dependent electro-optical response of BaTiO3 on SrTiO3-buffered Si(001) studied via spectroscopic ellipsometry
Format: International Journal
Publication date: 6/2017
Journal/Conference/Book: Optical Materials Express
Editor/Publisher: OSA, 
Volume(Issue): 7(6) p.291887
DOI: 10.1364/OME.7.002030
Citations: 15 (Dimensions.ai - last update: 17/10/2021)
5 (OpenCitations - last update: 19/4/2021)
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Abstract

To design a high performance BaTiO3 (BTO)-integrated Si modulator, understanding how BTO domain orientations influence its electro-optical (EO) properties is crucial. The 100-nm-thick BTO films with c-oriented and a-oriented domains are obtained by exploiting various thickness of SrTiO3 buffer layers grown on Si(001) substrates. Then, the electro-optical behavior for 2 differently oriented samples is analyzed using spectroscopic ellipsometry.

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