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Authors: M. Van Daele, M.B. E. Griffiths, A. Raza, M.M. Minjauw, S.T. Barry, R. Baets, C. Detavernier, J. Dendooven
Title: Near room temperature plasma enhanced atomic layer deposition of gold metal
Format: International Conference Proceedings
Publication date: Accepted for publication. Not yet published
Journal/Conference/Book: EuroCVD 22 - Baltic ALD
Location: Luxembourg, Luxembourg
Citations: Look up on Google Scholar

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