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Authors: C. Lin, D. Schaubroeck, G. Roelkens, R. Baets, N. Le Thomas
Title: Low-loss single-mode waveguides operating at UV/violet wavelengths and fabricated with contact optical lithography
Format: International Conference Poster
Publication date: 6/2020
Journal/Conference/Book: European Conference on Integrated Optics
Volume(Issue): p.3 pages
Citations: Look up on Google Scholar
Download: Download this Publication (353KB) (353KB)

Abstract

We demonstrate air-cladding single-mode waveguides operating at ultraviolet (UV) wavelengths with
propagation loss of 5 dB/cm at ë =402 nm. The waveguides are fabricated with atomic layer deposition (ALD) of
aluminium oxide (AlOx) on SiO2/Si substrates and with contact optical lithography. This enables an efficient, costeffective and fast processing. Our result paves the way for on-chip UV spectroscopy.

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