| Authors: | C. Lin, D. Schaubroeck, G. Roelkens, R. Baets, N. Le Thomas | | Title: | Low-loss single-mode waveguides operating at UV/violet wavelengths and fabricated with contact optical lithography | | Format: | International Conference Poster | | Publication date: | 6/2020 | | Journal/Conference/Book: | European Conference on Integrated Optics
| | Volume(Issue): | p.3 pages | | Citations: | Look up on Google Scholar
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Abstract
We demonstrate air-cladding single-mode waveguides operating at ultraviolet (UV) wavelengths with
propagation loss of 5 dB/cm at ë =402 nm. The waveguides are fabricated with atomic layer deposition (ALD) of
aluminium oxide (AlOx) on SiO2/Si substrates and with contact optical lithography. This enables an efficient, costeffective and fast processing. Our result paves the way for on-chip UV spectroscopy. Related Research Topics
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