| Authors: | N. Poonkottil, H. Rijckaert, K. Rajendran, R. R. Petit, L. I. D. J. Martin, D. Van Thourhout, I. Van Driessche, C. Detavernier, J. Dendooven | | Title: | Low temperature area selective atomic layer deposition of ruthenium dioxide thin films using polymers as inhibition layers | | Format: | International Journal | | Publication date: | 2/2023 | | Journal/Conference/Book: | Advanced Material Interfaces
| | Volume(Issue): | 10(5) p.paper 2201934 (10 pages) | | Citations: | Look up on Google Scholar
| | Download: |
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