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Authors: C. Cummins, B. Pan, G. Roelkens, M. Dahlem, S. Saseendran, P. Helin
Title: Material characterisation of LPCVD SiN and understanding loss behavior
Format: International Conference Proceedings
Publication date: 6/2023
Journal/Conference/Book: Conference on Lasers and Electro-Optics Europe
Volume(Issue): p.16
Citations: Look up on Google Scholar
Download: Download this Publication (443KB) (443KB)

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