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Authors: S.Fan, C. Lin, x. zheng, N. Le Thomas
Title: UV Photonic integrated Circuits for Structured Illumination Microscopy with High Optical Throughput
Format: International Conference Poster
Publication date: 11/2023
Journal/Conference/Book: Annual Symposium of the IEEE Photonics Society Benelux Chapter
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Download: Download this Publication (513KB) (513KB)

Abstract

Photonic integrated circuits (PICs) have the potential to upgrade the performances of standard optical microscopes. We have recently shown that PICs operating in the UV wavelength range enable label-free structured illumination microscopy (SIM) in a compact and robust way for biological imaging cells with improved spatial resolution. The state of the art for the field of view (FoV) of UV PICs-based SIM is currently 150 µm × 200 µm. This has been achieved by using a conventional imaging microscope objective, the numerical aperture of which was 0.5. The FoV is not limited by the imaging path but by the illumination, i.e. by the PIC design. Although a two-times resolution improvement is achieved, only a small fraction of the 1mm×1mm FoV offered by the objective, is used. Consequently, the optical throughput of the microscope is considerably limited, which hinders biological studies requiring the imaging of a large number of cells at the same time. To benefit from the maximum optical throughput, we present here a grating design for off-chip illumination at a wavelength of 360 nm with an 800 µm length. With a 2 nm shallow etched grating made of 5000 periods and patterned on an aluminum oxide waveguide, the FoV length is increased by four times.

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