| Authors: | C.Su, C.A J Concha, C. Lin, N.Quack, G.Christophe, N. Le Thomas | | Title: | Low-loss and high-index contrast UV-C free-standing waveguides made of thermal silicon oxide | | Format: | International Journal | | Publication date: | 6/2024 | | Journal/Conference/Book: | Optics Letters
| | Volume(Issue): | 49(13) | | DOI: | 10.1364/OL.530364 | | Citations: | Look up on Google Scholar
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Abstract
Photonics in the ultraviolet provides an avenue for key advances in biosensing, pharmaceutical research and environmental sensing. However, despite recent progress in photonic integration, a technological solution to fabricate photonic integrated circuits operating in the UV-C wavelength range, namely between 200 nm and 280 nm, remains elusive. Filling this gap will open opportunities for new applications, particularly in healthcare. A major challenge has been to identify materials with low optical absorption loss in this wavelength range that are at the same time compatible with waveguide design and large-scale fabrication. In this work, we unveil that thermal silicon oxide (TOX) on silicon substrate is a potential candidate for integrated photonics in the UV-C, by removing the silicon substrate under selected regions to form single-side suspended ridge waveguides. We provide design guidelines for low loss waveguide geometries, avoiding wrinkling due to residual intrinsic stress, and experimentally demonstrate waveguides that exhibit optical propagation losses below 3 dB/cm and 4 dB/cm at a wavelength of 266 nm with claddings of air and water, respectively. This result paves the way for on-chip UV-C biological sensing and imaging. Related Research Topics
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