|K. Naessens, P. Van Daele, R. Baets
|Microlens fabrication in PMMA with scanning excimer laser ablation techniques
|International Conference Proceedings
|Procceedings Symposium IEEE/LEOS Benelux Chapter,2000
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Laser ablation is a versatile technique for fabricating microstructures on polymer surfaces. Due to the
nature of the process, the fabrication of the microstructure can take place in a very late stage of a
heterogeneous assembly. This makes laser ablation very attractive for fabricating micro-optical
components on opto-electronic assemblies in comparison to other fabrication techniques like injection
molding and embossing.
In this paper we will report on the first experimental results of microlens fabrication with excimer laser
ablation techniques. By scanning the polymer surface along multiple circular paths with a circular beam
of a pulsed excimer laser, one is able to obtain a lens shape with arbitrary focal distance and diameter.
Important issues as choice of ablation parameters, selection of scanning path and performance of the
resulting laser ablated lens will be discussed.
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