Authors:	W. Bogaerts, V. Wiaux, D. Taillaert, S. Beckx, R. Baets
Title:	Photonic Crystal Waveguides in SOI fabricated with deep UV lithography
Format:	International Conference Proceedings
Publication date:	9/2002
Journal/Conference/Book:	European Conference on Optical Communication ECOC 2002
Volume(Issue):	p.4.4.5
Location:	Copenhagen, Denmark
Citations:	Look up on Google Scholar
Download:	(214KB)

Abstract

We demonstrate photonic crystals for 1550nm wavelengths fabricated with 248nm-excimer laser deep UV lithography in silicon-on-insulator, combining high resolution with mass-manufacturing. The structures are of high quality. Measurements show transmission through waveguides and sharp bends

Related Research Topics

• Silicon (nano)photonic devices fabrication with 193nm and 248nm (DUV) Optical lithography (1999-2012)

Related Projects

• IST: PICCO (Photonic Integrated Circuits using photonic Crystal Optics)
• IAP-V: PHOTON (Photons and Photonics : from basic physics to system concepts)