| Authors: | W. Bogaerts, D. Taillaert, R. Baets, V. Wiaux, S. Beckx |
| Title: | Deep UV lithography for mass-manufacturing photonic crystal based components |
| Format: | International Conference Proceedings |
| Publication date: | 8/2002 |
| Journal/Conference/Book: | Workshop 2D photonic crystals
|
| Volume(Issue): | p.III-24 |
| Location: | Ascona, Switzerland |
| Citations: | Look up on Google Scholar
|
