|P. Dumon, W. Bogaerts, J. Van Campenhout, V. Wiaux, J. Wouters, S. Beckx, R. Baets
|Low-loss photonic wires and compact ring resonators in silicon-on-insulator
|International Conference Proceedings
|LEOS Benelux Annual Symposium 2003
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We demonstrate low-loss, single-mode photonic wires in silicon-on-insulator as an enabling technology for future dense photonic integrated circuits. These waveguides are defined with 248nm deep UV lithography and have losses as low as 2.4dB/cm for a width of 500nm at 1550nm wavelength. Bends and directional couplers are fabricated and used to build ring resonators with 5?m radius, Q-factors higher than 3000 and insertion loss of around 2dB. The experimental results show clear agreement with a theoretical model of the resonators. We analyze the fabrication tolerances allowed for these resonators to be suitable as a building block for WDM filtering components.
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