| Authors: | R. Baets, W. Bogaerts |
| Title: | Nanophotonic waveguides in SOI by means of deep UV lithography |
| Format: | International Conference Presentation |
| Publication date: | 3/2004 |
| Journal/Conference/Book: | Photonic and Electromagnetic Crystal Structures (PECS-V)
(invited)
|
| Volume(Issue): | p.160 |
| Location: | Kyoto, Japan |
| Citations: | Look up on Google Scholar
|
| Download: |
 (234KB) |
