We demonstrate both ring resonator drop filters and arrayed waveguide gratings in Silicon-on-insulator photonic wires. The structures are fabricated in a CMOS line using deep UV lithography and dry etching processes. Waveguide losses are as low as 2.4dB/cm for a 500nm wide photonic wire, with excess bend losses of 0.03dB/90 degrees in a 3um bend. Using grating fiber couplers for measurements, we show ring and racetrack resonators with a Q up to 12700 and an 8-channel arrayed waveguide grating with a footprint of about 0.1mm2, 3nm channel spacing and -6dB crosstalk between channels.
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