| Authors: | S. Scheerlinck, D. Van Thourhout, R. Baets | | Title: | Replication of SOI Photonic Structures by Nano-Imprintlithography | | Format: | International Conference Proceedings | | Publication date: | 5/2004 | | Journal/Conference/Book: | IEEE/LEOS Benelux Chapter, Workshop on Photonic Materials and Technology
| | Volume(Issue): | p.16 | | Location: | Eindhoven, Netherlands | | Citations: | Look up on Google Scholar
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