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Authors: J. Schrauwen, F. Van Laere, D. Van Thourhout, R. Baets
Title: Focused-ion-beam fabrication of slanted fiber couplers in silicon-on-insulator waveguides
Format: International Conference Poster
Publication date: 12/2006
Journal/Conference/Book: Leos Benelux
Citations: Look up on Google Scholar
Download: Download this Publication (298KB) (298KB)


The ability forforming complex three dimensionalshapes isone ofthe primeadvantages
of focused ion beam based micromachining. We have used this technique to fabricate
slantedfibercouplersinsilicononinsulator. Simulationsshowcouplingefficienciesofup
to 63% for fiber couplers with 167 nm slits under an angle of 59° to the surface normal.
We have fabricated these devices with focused-ion-beam. The dimensions of the fabri-
cated structures are similar to the design, but we have not measured efficiencies larger
than 20%. The difference with the simulated value is probably caused by ion induced
damage inthe Si crystal.

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