|S. Selvaraja, M.Schaekers, W. Bogaerts, D. Van Thourhout, R. Baets
|Polycrystalline silicon as waveguide material for advanced photonic
|International Conference Proceedings
|11th IEEE/LEOS Benelux Annual Workshop 2007
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We report single mode polycrystalline-silicon on insulator photonic wire fabricated in a CMOS fabrication facility. The optical quality and the material aspects of the polycrystalline-silicon for photonic application were studies. We report an optical propagation loss of 13.4dB/cm which is the lowest loss reported for a 500nm wide photonic wire.
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