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Authors: K. De Vos, P.P.P. Debackere, R. Baets, P. Bienstman
Title: Label-free biosensors on Silicon-on-Insulator optical chips based on microring cavities and surface plasmon interferometry
Format: International Conference Proceedings
Publication date: 6/2008
Journal/Conference/Book: ICTON 2008 (invited)
Volume(Issue): 2 p.88-91
Location: Athens, Greece
DOI: 10.1109/icton.2008.4598599
Citations: 2 ( - last update: 7/7/2024)
1 (OpenCitations - last update: 3/5/2024)
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To come up to the demand for extremely sensitive biosensors for parallel real-time bioanalyses, we present two configurations of label-free biosensors on Silicon-on-Insulator optical chips. We discuss results on microring resonators and the design and fabrication of an integrated Surface Plasmon Resonance interferometer. The high refractive index contrast material offers submicron-size features with high quality for dense integration, high sensitivity and detection with very low analyte volumes. Fabrication with Deep UV lithography allows for mass production of cheap disposable biochips.

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