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Authors: J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, R. Baets
Title: Athermal Silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides
Format: International Journal
Publication date: 8/2009
Journal/Conference/Book: Optics Express
Volume(Issue): 17(17) p.14627-14633
DOI: 10.1364/OE.17.014627
Citations: 226 ( - last update: 21/7/2024)
150 (OpenCitations - last update: 3/5/2024)
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Athermal silicon ring resonators are experimentally demonstrated by overlaying a polymer cladding on narrowed silicon wires. The ideal width to achieve athermal condition for the TE mode of 220nm-height SOI waveguides is found to be around 350nm. After overlaying a polymer layer, the wavelength temperature dependence of the silicon ring resonator is reduced to less than 5 pm/°C, almost eleven times less than that of normal silicon waveguides. The optical loss of a 350-nm bent waveguide (with a radius of 15ìm) is extracted from the ring transmission spectrum. The scattering loss is reduced to an acceptable level of about 50dB/cm after overlaying a polymer cladding.

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