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Authors: W. Bogaerts, S. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, R. Baets
Title: Silicon-on-Insulator Spectral Filters Fabricated with CMOS Technology
Format: International Journal
Publication date: 2/2010
Journal/Conference/Book: J. Sel. Top. Quantum Electron. (invited)
Volume(Issue): 16(1) p.33-44
DOI: 10.1109/JSTQE.2009.2039680
Citations: 428 ( - last update: 14/7/2024)
309 (OpenCitations - last update: 3/5/2024)
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We give an overview of recent progress in passive
spectral filters and demultiplexers based on silicon-on-insulator photonic wire waveguides: ring resonators, interferometers, arrayed waveguide gratings and echelle diffraction gratings all
benefit from the high index contrast possible with silicon photonics. We show how the current generation of devices has improved crosstalk levels, insertion loss and uniformity thanks to an improved fabrication process based on 193nm lithography.

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