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Authors: K. Watanabe, J. Schrauwen, A. Leinse, D. Van Thourhout, R. Heideman, R. Baets
Title: Total reflection mirrors fabricated on silica waveguides with focused ion beam
Format: International Journal
Publication date: 8/2009
Journal/Conference/Book: Electronics Letters
Volume(Issue): 45(17) p.883-884
DOI: 10.1049/el.2009.0473
Citations: 4 (Dimensions.ai - last update: 9/5/2021)
3 (OpenCitations - last update: 3/5/2021)
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Abstract

Efficient total reflection mirrors are fabricated on silica-based waveguides by direct milling with a focused ion beam. To reduce the excess losses of the mirrors, a two-step milling technique is employed that reduces the roughness of the mirror surface while maintaining a high milling rate. A focused ion beam is used to fabricate low-loss mirrors with small excess losses of about 1.0 dB.


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