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Authors: J. Roels, B. Maes, R. Baets, D. Van Thourhout
Title: Integrated optomechanical circuits
Format: International Conference Proceedings
Publication date: 7/2010
Journal/Conference/Book: Integrated Photonics Research, Silicon and Nano Photonics (IPR) 2010 (invited)
Location: Monterey, United States
DOI: 10.1364/iprsn.2010.imf4
Citations: Look up on Google Scholar
Download: Download this Publication (234KB) (234KB)


Optomechanical circuits are a promising candidate to realize various signal processing
functions on a chip. In this paper we review several different NOMS structures fabricated in a
silicon-on-insulator platform.

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