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Authors: A. Masood, M. Pantouvaki, G. Lepage, P. Verheyen, J. Van Campenhout, P. Absil, D. Van Thourhout, W. Bogaerts
Title: Comparison of heater architectures for thermal control of silicon photonic circuits
Format: International Conference Proceedings
Publication date: 8/2013
Journal/Conference/Book: Group IV Photonics
Editor/Publisher: IEEE, 
Volume(Issue): p.ThC2
Location: Seoul, South Korea
DOI: 10.1109/group4.2013.6644437
Citations: 46 (Web of Knowledge / Dimensions.ai - last update: 27/9/2020)
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Download: Download this Publication (567KB) (567KB)

Abstract

We present a comparison of integrated heaters for
silicon photonics, based on doped silicon, silicide and tungsten metallization, with and without trenches and undercut for insulation. Results show similar thermo-optic efficiency, but with electrical resistivities spanning 2 orders of magnitude.

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