| Authors: | M. Verstuyft, E. Akiki, B. Walter, M. Faucher, M. Vanwolleghem, B. Kuyken | | Title: | An Integrated Photoacoustic Terahertz Gas Sensor | | Format: | International Conference Presentation | | Publication date: | 12/2018 | | Journal/Conference/Book: | 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
| | Editor/Publisher: | IEEE, | | Location: | Paris, France | | DOI: | 10.1109/IRMMW-THz.2019.8873764 | | Citations: | 3 (Dimensions.ai - last update: 4/1/2026)
3 (OpenCitations - last update: 27/6/2026)
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Abstract
An on-chip gas detector that transduces absorbed terahertz light to a mechanical motion using photoacoustics is proposed. The silicon chip confines light in an optical cavity, wherein an acousto-mechanical cavity is housed. The concentration of a trace gas can be determined from the amplitude of a membrane’s motion. The simulations presented predict a minimum detectable limit of 1 ppm of methanol for 1 mW of terahertz power and an integration time of 25 ms. Related Research Topics
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