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Authors: M. Verstuyft, E. Akiki, B. Walter, M. Faucher, M. Vanwolleghem, B. Kuyken
Title: An Integrated Photoacoustic Terahertz Gas Sensor
Format: International Conference Presentation
Publication date: 12/2018
Journal/Conference/Book: 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)
Editor/Publisher: IEEE, 
Location: Paris, France
DOI: 10.1109/IRMMW-THz.2019.8873764
Citations: 1 (Dimensions.ai - last update: 29/11/2020)
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Abstract

An on-chip gas detector that transduces absorbed terahertz light to a mechanical motion using photoacoustics is proposed. The silicon chip confines light in an optical cavity, wherein an acousto-mechanical cavity is housed. The concentration of a trace gas can be determined from the amplitude of a membrane’s motion. The simulations presented predict a minimum detectable limit of 1 ppm of methanol for 1 mW of terahertz power and an integration time of 25 ms.

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