| Authors: | D. Maes, G. Roelkens, M. Zaknoune, C. Op de Beeck, S. Poelman, M. Billet, M. Muneeb, S. Lemey, E. Peytavit, B. Kuyken | | Title: | Heterogeneous integration of uni-travelling-carrier photodiodes using micro-transfer-printing on a silicon-nitride platform | | Format: | International Conference Proceedings | | Publication date: | 6/2021 | | Journal/Conference/Book: | 2021 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO Europe-EQEC)
| | Volume(Issue): | p.paper CK-4.3 THU | | Location: | Munich, Germany (Virtual presentation) | | DOI: | 10.1109/CLEO/Europe-EQEC52157.2021.9542787 | | Citations: | 3 (Dimensions.ai - last update: 29/1/2023)
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Abstract
High-speed photodiodes often compromise responsivity in exchange for a reduced footprint. However, using waveguide photodiodes circumvents this limitation [1] . We combine uni-travelling-carrier photodiodes (UTC PDs) on a silicon nitride (SiN) photonic platform to achieve both high responsivity and high speed detectors. The SiN-platform has excellent properties such as low-loss waveguides and does not suffer from two-foton absorption at high optical power. A high responsivity is obtained through evanescent coupling of waveguide UTC photodiodes to SiN waveguides while still maintaining a small footprint. Related Research Topics
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