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Authors: T. Vandekerckhove, R. Van Assche, I. Tanghe, M. Niels, S. Poelman, T. Vanackere, M. Billet, S. Clemmen, B. Kuyken
Title: Highly-Selective Etching of Micro-Transfer-Pritned Thin-Film Lithium Niobate for Low Coupling Losses
Format: International Conference Proceedings
Publication date: 5/2024
Journal/Conference/Book: Conference on Lasers and Electro-Optics
Location: Charlotte, NC, United States
Citations: Look up on Google Scholar
Download: Download this Publication (1.6MB) (1.6MB)


Efficient low-loss coupling to micro-transfer-printed lithium niobate remains
a challenge. We developed a highly-selective lithium niobate etch that enables selective
etching of tapered coupling structures into the lithium niobate thin film after micro-transfer

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