Thomas Swann - INTEC: MOVPE for InGaAsP/InPFull Name: Development of 3x2" MOVPE reactor for the uniform growth of InGaAsP/InP and InAlGaP/GaAs materials Duration: 1/1/95-... Objective: - To develop growth process and optimise uniformity for InGaAsP/InP- and InAlGaP/GaAs-materials
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